Trifluorometano de alta pureza 99.9%

Fluoroforma, o trifluorometano, es el compuesto químico con la fórmula CHF 3. Es un hidrofluorocarbono, además de ser una parte Síntesis . No es un depletor de ozono, sino que es un gas de efecto invernadero .

Trifluorometano

Cas: 75-28-5

UN: 1984

Einecs: 200-872-4

Fórmula molecular: CHF3

Trifluorometano de alta pureza 99 . 9% se ha vuelto indispensable en la fabricación de semiconductores, particularmente para la fabricación de nodos avanzada por debajo de las 7 nm. Esta especificación requiere un control riguroso de las impurezas:<100 ppm moisture, <50 ppm oxygen, and <10 ppm total hydrocarbons. In plasma etch processes, high purity trifluoromethane 99.9% enables anisotropic silicon nitride removal with selectivity ratios exceeding 100:1 relative to oxide layers. The transition to 3D NAND architectures has increased demand for high purity trifluoromethane 99.9% by 25% annually, as these memory structures require extensive etching of high-aspect-ratio features. Gas delivery systems for high purity trifluoromethane 99.9% utilize electropolished stainless steel with ultra-high vacuum fittings, maintaining purity from cylinder to process chamber. Recent quality innovations include real-time FTIR monitoring during filling operations and cylinder passivation techniques that reduce metallic contaminants below 1 ppb. As EUV lithography becomes mainstream, high purity trifluoromethane 99.9% plays an expanding role in chamber cleaning processes that maintain mirror reflectivity.

Trifluoromethane is commonly used as a refrigerant in refrigeration and air conditioning systems due to its high cooling capacity and low toxicity. It is used in a variety of applications, including commercial refrigeration systems, automobile air conditioning units, and residential air conditioners. However, due to its high global warming potential, its use in these applications is being phased out and replaced with more environmentally friendly alternativas .

• Siempre use de acuerdo con la hoja de datos de seguridad (SDS) .
• El cilindro debe almacenarse y usarse en una posición vertical y segura en un área bien ventilada o monitoreada .
• Siga siempre los requisitos del código de fuego local al almacenar cilindros de gas .
• Peligros principales: fuego, asfixia .

Jiangsu MR Chemical Co., Ltd, stands at the forefront of innovation in the realm of gaseous productions, specializing in the full spectrum of standard gases, special gases, high-purity gases, and electronic gases, we mainly serves semiconductor, led, optical fiber, solar energy, petrochemical, biomedicine, University, scientific research, electric power, Electrónica, envío, mina de carbón, automóvil, médico, protección contra incendios, aeroespacial, alimentos, construcción, fundición, productos químicos finos, procesamiento y fabricación de industrias .

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